Cut and paste this URL to share the unmodified register and value:
https://regviz.com/r/Silicon Labs/Series0/EZR32WG/EZR32WG230F64R61/LESENSE/CH1_TIMING#0x0
Scan configuration
Set excitation time
Set sample delay
Set measure delay
https://github.com/cmsis-svd/cmsis-svd-data